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Spectroscopic Ellipsometry and Reflectometry: A User's Guide (Hardcover)

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Description


While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.

About the Author


Harland Tompkins retired from full-time employment in 2001. During his full-time employment, he was employed by General Electric Co., Bell Laboratories, the Idaho National Engineering Lab, and Motorola. William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.
Product Details
ISBN: 9780471181729
ISBN-10: 0471181722
Publisher: Wiley-Interscience
Publication Date: March 18th, 1999
Pages: 248
Language: English